Ders Öğretim Planı

Ders Kodu Ders Adı Ders Türü Yıl Dönem AKTS
ENNT620 Fabrication Technologies Of Thin Solid Films 927003 1 2 8

Dersin Amacı

It is aimed to introducing of thin solid films by advanced vacuum technologies and to teaching assignments on thin solid films on substrates

Dersin Veren Öğretim Görevlisi/Görevlileri

Asist Prof.Dr. İbrahim İNANÇ

Ön Koşul Dersleri

Yok

Önerilen Diğer Hususlar

Yok

Ders Kitabı / Malzemesi / Önerilen Kaynaklar

Professor S P Baker, Lecturer Notes, Mechanical properties of Thin Solid Films, Materials Science and Engineering, Cornell University, 2012. Çelik Tarımcı, H.Sarı, Vakum tekniği, First Edition, Ankara 2006.

Dersin Sunulduğu Dil

İngilizce

Staj Durumu

Yok

Dersin İçeriği

Glow discharge, behaviour of gases at a low pressure, fundamentals of vacuum and vacuum techniques, fundamentals of plasma physics, thin films depositions and metodologies on thickness measurement and thin film characterizations, tribology of thin film coatings

Haftalık Ders İçeriği

Hafta Teorik Uygulama Laboratuar Ders Notları
1 Voltage-current characteristics and high voltage
2 Gas behaviour at low pressure
3 Vacuum devices and feedtroughs
4 Ionisation, dissociation and recombination
5 Lorenz force, movement of charged particulates, electron, ion, exticed atoms
6 Glow discharge
7 Spark, Corona and Townsend discharge
8 X-Ray difraction of Thin solid films, Bragg’s Law, Laue Method, Sin2Ø Method
9 Electron back scatter diffraction (EBSD)
10 Mid-term exam
11 Tribological and hardness measurements (Nano hardness tests, scratch tests)
12 High-Energy X-Ray, Synchrotron source, Debye-Scherer Rings
13 Conical slits methods
14 Final exam
15
16

Dersin Öğrenme Çıktıları

# Öğrenme Çıktı Id Açıklama
1 1238353 Realizing a low-pressure gas behaviours at a high voltage
2 1238354 Learning about taking advantage of vacuum for thin film coatings
3 1238355 Learning of plasma state and discussing of interactiond of exiced atoms and ions at vacuum conditions
4 1238356 Characterizing thin films on a substrate
5 1238357 Considering tribological properties of thin films and layers

Bölüm Program Çıktıları

# Program Çıktı Id Açıklama